The Centura 5200 platform is AMAT's automated multi-cavity equipment platform. It can install six cavities. Cutting cavities are DPS Poly, DPS Metal, eMax, Super-E, MxP, MxS +, etc., and can be used for the corrosion of silicon oxide, silicon nitride, polycrystalline silicon, silicon and metal materials. CVD cavities have DxZ, CxZ, TxZ, WxZ, etc. They can be used for chemical vapor deposition of dielectric materials such as silicon oxide, silicon nitride and metal TiN, W. The Centura 5200 platform has high space utilization, stable transmission platform, and can be equipped with VHP transmission arm lifting equipment utilization, which is suitable for large-scale medium and high-end production lines. At the same time, the equipment is equipped with a powerful radio frequency system and a gas path system, which can enable the compatible development of a variety of processes. It has an easy man machine interface, large equipment market and perfect spare parts channel.